Introduction to MEMS: Design, Modeling and Fabrication

Micro-Electro-Mechanical Systems (MEMS) has revolutionized the fields of engineering. This field has also revolutionized the modern day chip design and as a result one could clearly see, billions of electronic components integrated on a small chip. MEMS are tiny machines that combine e3lectical and mechanical components to perform a wide range of functions. MEMS are everywhere now, from automotive sensors, biomedical devices to consumer electronics. MEMS technology has not only developed compact and efficient electronic devices but also, it has increased the precision with which they work. Since a famous lecture by Richard Feynman stating “There is Plenty of Room at the Bottom”, remarkable advents have taken place in miniaturization. Researchers around the
global have explored a lot in this area and have come up with devices having interesting capabilities. MEMS are
also inspired by the nature, although some of the laws of physics may not apply in form as they are. It is a interdisciplinary area, were people from engineering and basic science domains are attracted to contribute. Mans quest for smaller, faster and more powerful devices that can revolutionize various aspects of the life can be addressed by MEMS. As one continues to push the boundaries of what is possible with MEMS, one can unlock new possibilities for innovation and discovery.